Make the processors smaller and the wafers bigger therefore saving money in single volume production.
Make them cheaper
Don't part with your illusions. When they are gone you may still exist, but you have ceased to live.
Those curves aren't working anymore. See this: http://www.extremetech.com/computing/123529-nvidia-deeply-unhappy-with-tsmc-claims-22nm-essentially-worthless
If you don't feel like clicking, I'll summarize. TSMC can't offer the sort of guaranteed cost-savings that drove the entire foundry industry in the past, while attempts to scale immersion lithography through the use of fluids with a higher magnification factor or triple/quad-patterning are expensive and difficult.
EUV production is still having problems with power consumption and throughput. If you can't etch as many wafers/hour, your cost goes up. There's no way to make the chips smaller (IML is nearly finished), and no way to switch to 450mm wafers without additional cost adders.
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